Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Fabrication and characterization of silicon-based microsensors for detecting offensive $CH_3SH\;and\; (CH_3)_3N$ gases

  • Lee, Kyu-Chung (Department of Information Technology, Sungkyul University) ;
  • Hur, Chang-Wu (Department Electronic Engineering, Mokwon University)
  • Published : 2008.03.31
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Abstract

Highly sensitive and mechanically stable gas sensors have been fabricated using the microfabrication and micromachining techniques. The sensing materials used to detect the offensive $CH_3SH$ and $(CH_3)_3N$ gases are 1 wt% Pd-doped $SnO_2$ and 6 wt% $Al_2O_3$-doped ZnO, respectively. The optimum operating temperatures of the devices are $250^{\circ}C$ and $350^{\circ}C$ for $CH_3SH$ and $(CH_3)_3N$, respectively and the corresponding heater power is, respectively, about 55mW and 85mW. Excellent thermal insulation is achieved by the use of a double-layer membrane: i.e. $0.2{\mu}m$-thick silicon nitride and $1.4{\mu}m$-thick phosphosilicate glass. The sensors are mechanically stable enough to endure the heat cycles between room temperature and $350^{\circ}C$, at least for 30 days.

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References

  1. U. Dibbern, A Substrate for Thin-film Gas Sensors in Microelectronic Technology, Sensors and Actuators B, Vol. 2, pp. 63-70, 1990 https://doi.org/10.1016/0925-4005(90)80010-W
  2. P. Krebs and A. Grisel, A low power integrated catalytic gas sensor, Sensors and Actuators B, Vol. 13-14, pp. 155-158, 1993
  3. W.Y. Chung, C.H. Shim, S.D. Choi and D.D. Lee, Tin oxide microsensor for LPG monitoring, The 7th Int'nal Conf. on Solid-state Sensors and Actuators, Yokohama, 1993, pp. 428-431
  4. V.A. Zubstovsky, Y.M. Perov and Y.E. Sedakov, Design and manufacturing of gas sensors based on thin film semiconductors for oil and gas industries, The 4th Int'nal Meeting on Chemical Sensors, Tokyo, 1992, pp. 320-321
  5. Q. Wu, K.M. Lee and C.C. Liu, Development of chemical sensors using microfabrication and micromachining techniques, Sensors and Actuators B, Vol. 13-14, pp. 1-6, 1993
  6. V. Demarne and A. Grisel, An integrated low-power thin-film CO gas sensor on silicon, Sensors and Actuators 13, pp.301-313, 1988 https://doi.org/10.1016/0250-6874(88)80043-X
  7. V. Demarne and A. Grisel, A new SnO2 low temperature deposition technique for integrated gas sensors, Sensors and Actuators B, Vol. 15-16, pp. 63-67, 1993
  8. X. Wang, S. Yee and P. Carey, An integrated array of multiple thin-film metal oxide sensors for quantification of individual components in organic vapor mixtures, Sensors and Actuators B, Vol. 13-14, pp. 458-461, 1993
  9. D. J. Smith, J. F. Vetelino and R. S. Falconer, Stability, sensitivity and selectivity of tungsten trioxide films for sensing applications, Technical Digest of the 4th International Meeting on Chemical Sensors, 1992, pp. 312-315
  10. H. Nanto, H. Sokooshi and T. Usuda, Smell sensor using aluminium-doped zinc oxide thin film prepared by sputtering technique, Sensors and Actuators B, Vol. 10, pp. 79-83, 1993 https://doi.org/10.1016/0925-4005(93)80029-B
  11. Y. Takao, Y. Iwanaga, Y. Shimizu and M. Egashira, Trimethylamine-sensing mechanism of TiO2-based sensors 1. Effect of metal additives on trimethylamine-sensing properties of TiO2 sensors, Sensors and Actuators B, Vol. 10, pp. 229-234, 1993 https://doi.org/10.1016/0925-4005(93)87011-D
  12. I.-L. Kim, W.-B. Lee, J.-H. Cha and H.-D. Lee, Development of catalytic type gas sensor substrate by MEMS manufacturing process, Proceedings of Korean Hydrogen and New Energy Society, 2004, pp. 661-665
  13. D. M. Byrne and S. Taguchi, The Taguchi approach to parameter design, Quality Progress, December, 1987, pp. 19-26