초록
An object transport system is driven by a conveyor belt system or a magnetic levitation system. It is an indispensable device in many fields and especially it is very important in the factory automation. However, the conventional transport system can damage precision optical components by the contact force and destroy the inner structure of semiconductor by the magnetic field. The new transport system for transporting without damage is required. The ultrasonic transport system is a device that transports objects on the elastic body using ultrasonic wave. In this paper, an object transport system using the ultrasonic wave is developed for transporting precision elements without damage. Traveling waves are generated by the ultrasonic wave generator fixed in both ends of the beam. The traveling wave of the ultrasonic transport system is theoretically analyzed. Transport direction of the object is examined according to phase difference and frequency. The theoretical results are verified by experiments.