선대 평판형 플라즈마장치의 코로나 방전 및 오존발생 특성에 미치는 바이어스된 3전극의 영향

Effect of the Biased Third Electrode of a Wire-Plate Type Plasma Reactor on Corona Discharge and Ozone Generation Characteristics

  • 정재승 (경북대 대학원 전자전기컴퓨터학부) ;
  • 문재덕 (경북대 전자전기컴퓨터학부)
  • 발행 : 2008.04.01

Abstract

Corona discharge and ozone generation characteristics of a wire-plate plasma reactor, with a biased third electrode, have been investigated with an emphasis on the role of the bias voltage and frequency applied on the third electrode. It was found that the wire-plate plasma reactor, with the biased third electrode, had a switching characteristic on its I-V characteristics for negative and positive discharges, which is very different from that of a conventional wire-plate plasma reactor without the third electrode. As a result, the corona discharge and ozone generation characteristics of the proposed plasma reactor could be controlled by adjusting the bias voltage and frequency of the third electrode. The corona onset and breakdown voltages, and ozone generation and yield, were increased compared with those of without the third electrode. These, however, reveal the effectiveness of the biased third electrode.

Keywords

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