전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제57권4호
  • /
  • Pages.641-647
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  • 2008
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  • 1975-8359(pISSN)
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  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

수치해석을 통한 초미세 방전 소자의 방전 특성 연구

Nurmerical Study on the Discharge Characteristics of Cylindrical Microcavity Structure

  • 발행 : 2008.04.01
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초록

In this paper, we have studied the basic discharge characteristics of ac-type cylindrical microcavity structure. The structure has a two electrodes, which are positioned in the bottom of the cavity and in the side wall of the cylinder, respectively. The discharge showed asymmetric phenomena depending on the position of a cathode electrode. When the bottom electrode was a cathode, the discharge was stronger even though the area of the cathode was smaller than that of the anode. Simulation results revealed that the focused electric field toward the bottom electrode increased ion density in the space which in turn strengthened the cathode sheath and ionization process.

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참고문헌

  1. K.H. Schoenbach, A. El-Habachi, W. Shi, M.Ciocca, "High-pressure hollow cathode discharge", Plasma sources Sci. Technol. vol. 6, pp.468-477, 1997 https://doi.org/10.1088/0963-0252/6/4/003
  2. K.H. Schoenbach, A. El-Habachi, M.M.Moselhy,W.Shi, R.H.Stark, "Microhollow cathode discharge excimer lamps", Physics of Plasma, vol.7, no.5, pp.2186-2191, 2000 https://doi.org/10.1063/1.874039
  3. S. J. Park, K.S. Kim, A. J. Price, P.A. Tchertchian, P. Y.Chen, J.K.Yoon, J.G. Eden, " Large scale arrays of microcavity plasma devices based on encapsulated Al/Al2O3 electrodes: Device characteristics as a plasma display pixel and low cost wet chemical fabrication processing" Digest of Technical Papers- SID, vol.38, no1, pp. 538-541, 2007
  4. P.S. Kothnur, L. L. Raja, "Two-dimensional simulation of a direct-current microhollow cathode discharge", J. Appl. Phys., vol. 97, pp. 043305, 2005 https://doi.org/10.1063/1.1849816
  5. M.J.Kushner, "Modeling of microdischarge devices: Pyramidal structures", J. Appl. Phys., vol. 95, no.3, pp. 846-858, 2004 https://doi.org/10.1063/1.1636251
  6. J. Seo, J.G.Eden, "Two-dimensional simulation of ac-driven microplasma confined to $100-300{\mu}m$ diameter cylindrical microcavities in dielectric barrier devices", J. Appl. Phys., vol. 100, pp. 123302, 2006 https://doi.org/10.1063/1.2398024
  7. J.Seo, W.Chung, C. Yoon, J. Kim, K. Whang, "Two dimensional modeling of a surface type alternating current plasma display", IEEE trans. on plasma science, vol. 29, issue 5 Part: 2, pp.824-831, 2001 https://doi.org/10.1109/27.964482