초록
The transducer for multi-directionally movable ultrasonic motor having lambda shaped vibrators has been proposed and designed. The two branches cross at a right angle with each other at the tip. FEM analyses of lambda shaped transducer were carried out to find vibration modes for ultrasonic motor. The lambda shaped transducer has one symmetric mode and two anti-symmetric modes. The symmetric mode generates the normal direction motion of the tip. The lateral and vertical direction motion of the tip are excited by two anti-symmetric modes. The normal and lateral direction motions made an lateral elliptic trajectory. And the normal and vertical direction motions made an vertical elliptic trajectory normal to previous one. The transducer with 1 mm in thickness and 25 mm in length has been fabricated and evaluated. The resonance frequencies of the transducer was 32 kHz and 103 kHz. The tangential and vertical vibration displacement of the transducer having the lateral elliptic trajectory were $1.5{\mu}m\;and\;1.1{\mu}m$, respectively at the driving voltage of 100 Vpp and frequency of 32 kHz and 103 kHz. And the tangential and vertical vibration displacement of the transducer having the vertical elliptic trajectory were $0.4{\mu}m\;and\;0.2{\mu}m$, respectively at the same driving condition.