Development of Precision Moving Instrument by Using the Uni-morph type PZT Actuator

유니몰프 PZT 액츄에이터를 이용한 정밀 이송기구의 개발

This paper presents a new precision moving instrument for the displacement and direction control using the uni-morph type PZT actuator. The instrument is composed of the two-body and a link. The body has the uni-morph type PZT actuator, which make the vibration. Movement of simple moving instrument is generally analyzed by the theory of center-of-gravity moment. However the analysis of the instrument in this paper is focused the resonance of instrument. Resonance of the body is originated a uni-morph type PZT actuator that is vibrated by voltage and frequency. The basic performances of one body instrument are analyzed by the FEM analysis. And experiments are also performed to confirm the linear movement of the instrument and direction control. it is proper a voltage control than a frequency control for the direction changing. And Moving velocity is 0.032m/s.