한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)
- 제7권3호
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- Pages.81-86
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- 2008
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- 1598-6721(pISSN)
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- 2288-0771(eISSN)
백색광을 이용한 곡률 측정법 개발
A curvature profilometry using white-light
초록
I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.