A curvature profilometry using white-light

백색광을 이용한 곡률 측정법 개발

  • 김병창 (경남대학교 기계자동화공학부)
  • Published : 2008.09.30

Abstract

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

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