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마이크로 압전변압기 제작 및 전기-기계적 특성 분석

Fabrication and Electro-Mechanical Characteristic Analysis of Piezoelectric Micro-transformers

  • 김성곤 (한국기계연구원 나노공정장비연구센터) ;
  • 서영호 (강원대학교 기계메카트로닉스공학부) ;
  • 황경현 (한국기계연구원 나노공정장비연구센터) ;
  • 최두선 (한국기계연구원 나노공정장비연구센터)
  • 발행 : 2008.03.01

초록

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

키워드

참고문헌

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