참고문헌
- Hung, S. T., Wong, S. C., and Fang, W.(2000), "The development and application of microthermal sensors with mesh-membrane supporting structure," Sensors and Actuators A, Vol. 84, pp. 70-75 https://doi.org/10.1016/S0924-4247(99)00358-1
- Kaltsas, G., Nassiopoulos, A. A. and Nassiopoulou, A. G. "Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation," IEEE Sensors J., Vol. 2, No. 5, pp. 463-475, Oct. 2002 https://doi.org/10.1109/JSEN.2002.806209
- Lin, G. C., Wang, L., Yang, C. C., Shih, M. C. and Chuang, T. J.(1998), "Thermal performance of metal-clad fiber Bragg grating sensors," IEEE Photon. Technol. Lett., vol. 10, no. 3, pp. 406-408 https://doi.org/10.1109/68.661425
- Lim, J., Yang, Q. P., Jones, B. E., and Jackson, P. R.(2001), "DP flow sensor using optical fiber grating," Sensors and Actuators A, Vol. 92, pp. 102-108 https://doi.org/10.1016/S0924-4247(01)00546-5
- Nemoto, T., Hashimoto, Y., Sato, S. and Iitaka, H.(1998), "An optical fiber flow speed sensor of increased sensitivity," Elect. Eng. Jpn., pp. 1-8
- Oda, S., Anzai, M., Uematsu, S., and Watanabe, K.(2003), "A silicon micromachined flow sensor using thermopiles for heat transfer measurements," IEEE Trans. Instrum. Meas., Vol. 52, No. 4, pp. 1155-1159 https://doi.org/10.1109/TIM.2003.815997
- Okamoto, K., Ohhashi, T., Asakura, M., and Watanabe, K.(1994), "A digital anemometer," IEEE Trans. Instrum Meas., vol. 43, no. 2, pp. 116-120 https://doi.org/10.1109/19.293406
- Shyu, C. T. and Wang, L.(1994), "Sensitive linear electric current measurement using two metal-coated singlemode optical fibers," J. Lightwave Technol., Vol. 12, No. 11, pp. 2040-2048 https://doi.org/10.1109/50.336070
- Svedin, N., Kalvesten, E., and Stemme, G.(2003), "A new edge-detected life force flow sensor," J. Microelectromech. Syst., Vol. 12, pp. 344-354 https://doi.org/10.1109/JMEMS.2002.807479
- Wu, J. and Sansen, W.(2002), "Electrochemical time of flight flow sensor," Sensors and Actuators A, Vol. 97-98, pp. 68-74 https://doi.org/10.1016/S0924-4247(01)00823-8
피인용 문헌
- Experimental investigation on mass flow rate measurements using fibre Bragg grating sensors vol.171, 2017, https://doi.org/10.1088/1757-899X/171/1/012136