Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Synthesis of Tantalum Oxy-nitride and Nitride using Oxygen Dificiency Tantalum Oxides

산소결핍 탄탈륨 산화물을 활용한 탄탈륨 산질화물 및 질화물 합성

  • Park, Jong-Chul (Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology) ;
  • Pee, Jae-Hwan (Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology) ;
  • Kim, Yoo-Jin (Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology) ;
  • Choi, Eui-Seock (Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology)
  • 박종철 (요업(세라믹)기술원 산업도자팀) ;
  • 피재환 (요업(세라믹)기술원 산업도자팀) ;
  • 김유진 (요업(세라믹)기술원 산업도자팀) ;
  • 최의석 (요업(세라믹)기술원 산업도자팀)
  • Published : 2008.12.28
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Abstract

Colored tantalum oxy-nitride (TaON) and tantalum nitride ($Ta_{3}N_{5}$) were synthesized by ammonolysis. Oxygen deficient tantalum oxides ($TaO_{1.7}$) were produced by a titration process, using a tantalum chloride ($TaCl_5$) precursor. The stirring speed and the amount of $NH_{4}OH$ were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.

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References

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