센서학회지 (Journal of Sensor Science and Technology)

  • 제17권4호
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  • Pages.250-255
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  • 2008
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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글루코오스 농도 측정을 위한 볼로미터 타입의 적외선 센서 제작

The fabrication of bolometric IR detector for glucose concentration detection

  • 최주찬 (경북대학교 전자전기컴퓨터학부) ;
  • 정호 (경북대학교 전자전기컴퓨터학부) ;
  • 박건식 (한국전자통신연구원 공전기술팀) ;
  • 박종문 (한국전자통신연구원 공전기술팀) ;
  • 구진근 (한국전자통신연구원 공전기술팀) ;
  • 강진영 (한국전자통신연구원 공전기술팀) ;
  • 공성호 (경북대학교 전자전기컴퓨터학부)
  • Choi, Ju-Chan (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Jung, Ho (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Park, Kun-Sik (Process Technology Team, Electronics and Telecommunications Research Institute) ;
  • Park, Jong-Moon (Process Technology Team, Electronics and Telecommunications Research Institute) ;
  • Koo, Jin-Gun (Process Technology Team, Electronics and Telecommunications Research Institute) ;
  • Kang, Jin-Yeong (Process Technology Team, Electronics and Telecommunications Research Institute) ;
  • Kong, Seong-Ho (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University)
  • 발행 : 2008.07.31
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초록

A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.

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참고문헌

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