전자공학회논문지 IE

The Institute of Electronics and Information Engineers (대한전자공학회)
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Fabrication of triode type Ti-silicided field emission tip array

3극 티타늄 실리사이드 전계방출 팁 어레이의 제작

  • Ohm, Woo-Yong (Department of Digital Electronics & Information, Inha Technical College)
  • 엄우용 (인하공업전문대학 디지털전자정보과)
  • Published : 2007.09.25
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Abstract

A new field emission tip array was realized by Ti silicidation of Ti coated Si tip, which has long term durability, chemical stability, and high emission current density. The fabricated Ti silicided FE tip array under high vacuum condition of about $10^{-8}Torr$ shows that the turn-on voltage is about 40V and the emission current is about $69{\mu}A$ when the bias of 150V is applied between anode and cathode of $100{\mu}m$ distance.

Si 팁 기술의 장점을 살리면서 팁을 실리사이드화하여 팁표면의 열화학적 내구성을 증가시키고 전계방출 전류밀도를 금속 팁에 가깝게 끌어올릴 수 있는 새로운 3극관 형태의 전계방출 팁 구조를 제작하였다. 제작된 소자의 전계방출 특성을 $10^{-8}Torr$의 초고진공 상태에서 캐소드-애노드 간격을 $100{\mu}m$로 하여 측정한 결과, turn-on 전압이 약 40V로, 방출전류가 인가 전압 150V에서 약 $69{\mu}A$로 나타났다.

Keywords

References

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