References
- P. Rudent and P. Navratil, 'Design of a new sensor for mass flow controller using thin-film technology based on an analytical thermal model', J. Vac. Sci. Technol., Vol. A, No. 16, p. 3559, 1998
- S. K. Park, S. H. Kim, S. H. Kim, and Y. D. Kim, 'A flow direction sensor fabricated using MEMS technology and its simple interface circuit', Sens. Actuators B, Vol. 91, No.1, p. 347,2003 https://doi.org/10.1016/S0925-4005(03)00109-6
- J. E. Sundeen and R. C. Buchanan, 'Electrical properties of nickel-zirconia cermet films for temperature and flow-sensor application', Sens. Actuators A, Vol. 63, No.1, p. 33, 1997
- A. F. P. Van Putten and S. Middlehoek, 'Integrated silicon anemometer', Electronic Lett., Vol. 10, p. 425,1974
- K. Petersen and J. Brown, 'High-precision, highperformance mass-flow sensor with integrated laminar flow micro-channels', Proc. Trans.'85, p. 361, 1985
- A. Michalski, 'Flow measurements in open irrigation channels', IEEE Instrum. Measur. Mag., Vol. 3, p. 12, 2000
- J. S. J. Chen, 'On the design of a wide range miniflow paddlewheel flow sensors', Sens. Actuators A, Vol. 87, No.1, p. 1, 2000
- R. S. Okojie, A. A. Ned, A. D. Kurtz, and W. N. Carr, 'Characterization of highly Doped n- and p-type 6H-SiC Piezoresistors', IEEE Transactions on Electron Devices, Vol. 45, p. 785, 1998
- S. S. Noh, C. S. Lim, G. S. Chung, and K. H. Kim, 'Fabrication of PRTs and analysis of characteristics', IEE Electronic Lett., Vol. 39, p. 1179, 2003 https://doi.org/10.1049/el:20030755
- S. S. Noh, X. Fu, L. Chen, and M. Mehregany, 'A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD', Sensors and Actuators A, Vol. 136, No.2, p. 613, 2007 https://doi.org/10.1016/j.sna.2006.12.024
- J. E. Sudden and R. C. Buchanan, 'Thermal sensor properties of cermet resistor films on silicon substrates', Sens. Actuators A, Vol. 90, No.1, p. 118,2001
- J. M. Nel, F. D. Auret, L. Wu, M. J. Legodi, W. E. Meyer, and M. Hayes, 'Fabrication and characterisation of NiO/ZnO structures', Sens. Actuators B, Vol. 100, No.1, p. 270, 2004 https://doi.org/10.1016/j.snb.2003.12.054
- J. Zang, Y. Nagao, S. Kuwano, and Y. Ito, 'Microstructure and temperature coefficient of resistance of platinum films', Jpn. J. Appl, Phys., Vol. 36, p. 834, 1997