한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

영구자석 이동형 선형 모터를 가진 초소형 공기베어링 스테이지

A Miniature Air-Bearing Positioning Stage with a Magnet-Moving Linear Motor

  • 노승국 (한국기계연구원 지능기계연구센터) ;
  • 박종권 (한국기계연구원 지능기계연구센터)
  • 발행 : 2007.08.01
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초록

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

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참고문헌

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