The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of MEMS Inkjet Head for Drop-on-Demand Ejection of Electrostatic Force Method

정전기력 방식의 Drop-on-Demand 토출을 위한 MEMS 잉크젯헤드 제작

  • 손상욱 (성균관대학 대학원 정보통신공학부) ;
  • 김영민 (성균관대학 지능시스템연구센터) ;
  • 최재용 (성균관대학 대학원 정보통신공학부) ;
  • 고한서 (성균관대학 기계공학부) ;
  • 김용재 (성균관대학 대학원 기계공학부) ;
  • 변도영 (건국대학 기계항공공학부) ;
  • 이석한 (성균관대학 정보통신공학부)
  • Published : 2007.08.01
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Abstract

This paper presents a novel electrostatic drop-an-demand ejector with a conductive pole inside nozzle. The MEMS fabricated pole-type nozzle shows a significant improvement in the performance and reliability of forming meniscus and generating a micro dripping mode of droplet out of the meniscus. It is verified experimentally that the use of the pole-type nozzle. The liquid is used D20+SDS+SWNT (5 %wt). The gap between upper electrode and nozzle is about 600 um. Electrostatic drop-an-demand ejection is observed when a DC voltage of 1.5 kV is applied between the control electrode and ground electrode. Droplet diameter is $100{\mu}m$.

Keywords

References

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