한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제20권8호
  • /
  • Pages.685-690
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  • 2007
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  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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일체형 인치웜 방식 액츄에이터의 설계 및 특성

Design and Characteristics of a Monolithic Inchworm Type Actuator(MITA)

  • 강형원 (전자부품연구원 전자소재패키징연구센터) ;
  • 최용준 (전자부품연구원 전자소재패키징연구센터) ;
  • 이형규 (전자부품연구원 전자소재패키징연구센터)
  • 발행 : 2007.08.01
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초록

The new design of inchworm-type piezoelectric actuator is presented in this paper, Compared to conventional inchworm-type actuators, which are composed of more than three piezoelectric bodies, we can reduce the number of piezoelectric bodies by employing the proposed design, resulting in only one piezoelectric body. The overall size of the proposed actuator which consists of one piezoelectric body, two clamping parts and one extending part, is only $5{\times}6{\times}9 [mm^3]$ (DWL). The actuating characteristics of fabricated Monolithic Inchworm Type Actuator(MITA), were found to be a displacement of $0.3{\mu}m$, a generating force of 0.6N and an electric power of 0.5W.

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참고문헌

  1. C. Niezrecki, D. Brei, S. Balakrishnan, and A. Moskalik, 'Piezoelectric actuation : State of the art', The Shock and Vibration Digest, Vol. 33, No. 4, p. 269, 2001 https://doi.org/10.1177/058310240103300401
  2. P. E. Tenzer and R. Ben Mrad, 'On amplification in inchworm precision positioners', Mechatronics, Vol. 14, p. 515, 2004 https://doi.org/10.1016/j.mechatronics.2003.10.004
  3. C. W. Moon, S. H. Lee, and J. K. Chung, 'A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback', Mechatronics, Vol. 16, p. 105, 2006 https://doi.org/10.1016/j.mechatronics.2005.10.003