한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제24권6호
  • /
  • Pages.96-104
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  • 2007
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

AFM에서의 정량적 힘 측정을 위한 마이크로 캔틸레버의 강성 교정

Accurate Determination of Spring Constants of Micro Cantilevers for Quantified Force Metrology in AFM

  • 김민석 (한국표준과학연구원(KRISS) 기반표준부 역학그룹) ;
  • 최재혁 (한국표준과학연구원(KRISS) 기반표준부 역학그룹) ;
  • 김종호 (한국표준과학연구원(KRISS) 기반표준부 역학그룹) ;
  • 박연규 (한국표준과학연구원(KRISS) 기반표준부 역학그룹)
  • 발행 : 2007.06.01
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초록

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

키워드

참고문헌

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