전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제56권7호
  • /
  • Pages.1294-1297
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  • 2007
  • /
  • 1975-8359(pISSN)
  • /
  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

나노스케일의 금속 나노빔 시험편 제작 및 이를 이용한 금 박막 나노 구조물의 기계적 물성 평가

Fabrication of Nanoscale Metal Nanobeam Specimens and Evaluation of the Mechanical Properties of Gold Thin Film Nanostructures

  • 백창욱 (중앙대학교 전자전기공학부) ;
  • 현익재 (중앙대학교 전자전기공학부)
  • 발행 : 2007.07.01
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초록

In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be $109.6\;{\pm}\;10\;GPa\;and\;1.73\;{\pm}\;0.3\;GPa$, respectively, from the nanoindentation test, while elastic modulus was $241\;{\pm}\;7\;GPa$ from the nanobeam bending test.

키워드

참고문헌

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