한국자기학회지 (Journal of the Korean Magnetics Society)

  • 제17권3호
  • /
  • Pages.137-140
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  • 2007
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  • 1598-5385(pISSN)
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  • 2233-6648(eISSN)
한국자기학회 (The Korean Magnetics Society)
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레이저 간섭 석판술로 전처리된 AAO을 이용한 Fe 나노점 제작

Fabrication of Fe Nanodot Using AAO Prepatterned by Laser Interference Lithography

  • Hwang, H.M. (Institute of Physics and Applied Physics, Yonsei University) ;
  • Kang, J.H. (Institute of Physics and Applied Physics, Yonsei University) ;
  • Lee, S.G. (Institute of Physics and Applied Physics, Yonsei University) ;
  • Lee, J. (Institute of Physics and Applied Physics, Yonsei University)
  • 발행 : 2007.06.30
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초록

레이저 간섭 석판 장비(Laser Interference Lithography; LIL)를 이용하여, Anodic Aluminum Oxide(AAO) 나노기공의 배열을 향상 시켰다. 이후 진공에서 Fe와 Cu를 AAO/Si에 성장하고, AAO를 제거하여 Cu/Fe(20 nm) 나노구조를 제작하였다. AAO의 나노기공과 나노구조는 전처리 과정에서 제작된 PR(photoresist) 나노선을 따라 1차원으로 배열되었다. 자성 나노구조의 자기이력곡선으로부터 이들이 vortex 구조를 가지며, 쌍극자 상호작용이 지배적임을 확인하였다.

The ordering of nanopores in AAO has been improved by using laser interference lithography. After growing Fe and Cu on this substrate in vacuum and removing AAO, Fe nanodots are fabricated. The nanopores in AAO and nanodots are ordered in one dimension following the prepatterning. It has been confirmed from the magnetic hysteresis loop that the Fe nanodots have vortex structure and the dipolar interaction is dominant among them.

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