International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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The Small Angle Generator Based on a Laser Angle Interferometer

  • Eom, Tae-Bong (Length/Time Group, Korea Research Institute of Standards and Science) ;
  • Jeong, Don-Young (Length/Time Group, Korea Research Institute of Standards and Science) ;
  • Kim, Jae-Wan (Length/Time Group, Korea Research Institute of Standards and Science)
  • Published : 2007.07.01
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Abstract

To calibrate precision autocollimators, the Korean Research Institute of Standards and Science (KRISS) has built a small angle generator using a laser interferometer. The system is based on a sine bar mechanism in which the angle is determined from the ratio of two lengths. The rotational angle is measured by the angle interferometer and the heterodyne laser interferometer detects the relative displacement of two retro-reflectors attached to the rotating arm. The distance between the two retro-reflectors of the laser angle interferometer is self-calibrated by an index table positioned on the rotating arm. The resolution of the system is 0.002 seconds, and the accuracy is better than 0.04 seconds within a measuring range of $\pm$1 degree. The small angle generator can also be used with an index table that can divide one circle into 1440 angles. The combined system can generate any angle over 360 degrees to an accuracy of 0.11 seconds.

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References

  1. OIML Reporting Secretariat, 'Traceability in plane angle measurement,' OIML Bulletin, Vol. 35, pp. 23-26, 1994
  2. Moller-Wedel, 'Model Elcometer-HR specifications,' 1999
  3. Beyer, W. and Pahl, W., 'Winkelmesseinrichtung zum Prufen fotoelektrischem Autokollimationsfernrohre,' FeinwerktechnikMesstechnik, Vol. 82, pp. 267-269,1974
  4. Jablonsk, R., 'Interferometric measurement of angles,' Measurement, Vol. 4, pp. 148-153,1986 https://doi.org/10.1016/0263-2241(86)90008-4
  5. Bird, H. M. B., 'A computer controlled interferometer system for precision relative angle measurements,' Rev. Sci. Instrum., Vol. 42, pp. 1513-1520, 1971 https://doi.org/10.1063/1.1684920
  6. Moore Special Tool Co., 'Model 1440 Small-Angle Divider specification,' 1980
  7. Fujimoto, H., Watanabe, T. and Nakayama, K., 'Accurate angle measurement system with nano-radian resolution over wide angular measurement range,' Proceedings of the 15th IMEKO World Congress, pp. 179, 1999
  8. Hewlett-Packard, 'Model 5517AnOperation Manual,' 1993
  9. Shi, P. and Stijns, E., 'New optical method for measuring smallangle rotations,' Appl. Opt., Vol. 27, pp. 4342-4344, 1988 https://doi.org/10.1364/AO.27.004342
  10. ISO, 'Guide to the expression of uncertainty in measurement,' 1995
  11. Watanabe, T., Fujimoto, H., Nakayama, K., Masuda, T. and Kajitani, M., 'Automatic high precision calibration system for angle encoder,' SPIE, Vol. 5190, pp. 400-409, 2003
  12. Stone, J., Amer, M., Faust, B. and Zimmerman, J., 'Angle metrology using AAMACS and two small-angle measurement system,' SPIE, Vol. 5190, pp. 146-155,2003