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Electromagnetic and Thermal Analysis of Phase Change Memory Device with Heater Electrode

발열 전극에 따른 상변화 메모리 소자의 전자장 및 열 해석

  • 장낙원 (한국해양대학교 전기전자공학부) ;
  • 마석범 (용인송담대학교 조명인테리어과) ;
  • 김홍승 (한국해양대학교 나노데이타 시스템학부)
  • Published : 2007.05.31

Abstract

PRAM (Phase change random access memory) is one of the most promising candidates for next generation non-volatile memories. However, the high reset current is one major obstacle to develop a high density PRAM. One way of the reset current reduction is to change the heater electrode material. In this paper, to reduce the reset current for phase transition, we have investigated the effect of heater electrode material parameters using finite element analysis. From the simulation. the reset current of PRAM cell is reduced from 2.0 mA to 0.72 mA as the electrical conductivity of heater is decreased from $1.0{\times}10^6\;(1/{\Omega}{\cdot}m$) to $1.0{\times}10^4\;(1/{\Omega}{\cdot}m$). As the thermal conductivity of heater is decreased, the reset current is slightly reduced. But the reset current of PRAM cell is not changed as the specific heat of heater is changed.

Keywords

References

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