Journal of Electrical Engineering and Technology

  • 제2권1호
  • /
  • Pages.50-54
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  • 2007
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  • 1975-0102(pISSN)
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  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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A Dual-Servo Type VCM for a Nano-Level Measurement System

  • Yoo, Yong-Min (Compressor R&D group, Compressor team, Samsung Gwangju Electronics) ;
  • Kwon, Byung-Il (Dept. of Electrical Engineering, Hanyang University)
  • 발행 : 2007.03.01
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초록

In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.

키워드

참고문헌

  1. Tosiyuki Shima, Hiroyasu Fujimori, 'An accurate measurement of magnetostriction of thin film by using nano indentation system', IEEE Transactions on magnetics, Vol. 35, No. 5, pp. 3843-3844, 1999
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  5. Masahito Kobayashi and Roberto Horowitz, 'Track Seek Control for Hard Disk Dual-Stage Servo Systems', IEEE Transaction on magnetics, Vol. 37, No. 2, pp. 949-954, 2001 https://doi.org/10.1109/20.917648
  6. J. H. Cho, J. W. Lee, C. K. Lee, B. I. Kwon, 'Optimal Design of Extremely Small Thrust VCM for Nanoindenter', The Transactions of the KIEE, Vol. 53, No. 2, pp. 69-75, 2004
  7. D. H. Kim, S. J. Eum, G. H. Kang, J. P. Hong, G. T. Kim, 'Design and Characteristic Analysis of Moving Coil type Linear Oscillatory Actuator Considering Unbalanced Magnetic Circuit', The Transactions of the KIEE, Vol. 49, No. 6, pp. 403-410, 2000

피인용 문헌

  1. Dual Speed Control Scheme of Servo Drive System for a Nonlinear Friction Compensation vol.23, pp.2, 2008, https://doi.org/10.1109/TPEL.2007.915046