A Study on Laser Ablation of Copper Thin Foil by 355nm UV Laser Processing

355nm UV 레이저를 이용한 구리 박판 가공 시 어블레이션에 관한 연구

  • Published : 2007.02.01

Abstract

Usually nanosecond pulsed laser processing of metal is mainly affected by the thermal ablation. Many studies of the theoretical analysis and modeling to predict the laser ablation of metal are suggested on the basis of the photothermal mechanism at higher laser fluence. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper foils and propose the simplified SSB Model(Srinivasan-Smrtic-Babu model) to study the photothermal effect of nanosecond pulsed laser ablation. The experimental results show that the photothermal ablation of the 355nm DPSS $NdYVO_{4}$ laser is useful to process the copper thin foils.

Keywords

References

  1. Kim, J. G., Chang, W. S., Shin, B. S., Chang, J. W. and Whang, K. H., 'Blind via hole drilling using DPSS UV laser,' Journal of Korean Society of Laser Processing, Vol. 6, No. 1, pp. 9-16, 2003
  2. Shin, B. S., Kim, J. G., Chang, W. S. and Whang, K. H., 'Rapid manufacturing of 3D micro products by UV laser ablation and phase change filling,' Journal of the Korean Society for Precision Engineering, Vol. 22, No. 11, pp. 196-201, 2005
  3. Yoon, K. K., Lee, S. K., Kim, J. G., Shin, B. S., Choi, D. S., Whang, K. H. and Park, J. Y., 'Laser beam application and technology in micro machining,' Journal of the Korean Society for Precision Engineering, Vol. 17, No. 7, pp. 27-35, 2000
  4. Shin, B. S., Yang, S. B., Chang, W. S., Kim, J. G. and Kim, J. M., 'Rapid manufacturing of 3D-shaped microstructures by UV laser ablation,' Journal of the Korean Society for Precision Engineering, Vol. 21, No. 7, pp. 30-36, 2004
  5. Oh, B. K. and Kim, D. S., 'Numerical simulation of nanosecond pulsed laser ablation in air,' Journal of Korean Society of Laser Processing, Vol. 6, No. 3, pp. 37-45, 2003
  6. Shin, D. S., Lee, J. H., Suh, J. and Kim, T. H., 'Excimer laser induced ablation of PMMA and PET,' Journal of Korean Society of Laser Processing, Vol. 6, No. 1, pp. 33-40, 2003
  7. Yoon, K. K. and Bang, S. Y., 'Modeling of polymer ablation with excimer lasers,' Journal of the Korean Society for Precision Engineering, Vol. 22, No. 9, pp. 60-68, 2005
  8. Liu, Z. G., Song, H. W., Zheng, Z. H., Lu, S. Z., Yu, L. X. and Yang, L. M., 'Femtosecond laser induced photochemical reaction and configuration change of silver nanorod clusters in aqueous solution,' Colloids and Surfaces A: Physicochem. Eng. Aspects, Vol. 275, pp. 69-72, 2006 https://doi.org/10.1016/j.colsurfa.2005.09.021
  9. Hashida, M., Semerok, A. F., Gobert, O., Petite, G., Izawa, Y. and Wagner, J. F. 'Ablation threshold dependence on pulse duration for copper,' Applied Surface Science, Vol. 197-198, pp. 862-867, 2002 https://doi.org/10.1016/S0169-4332(02)00358-6
  10. Mannion, P. T., Magee, J., Coyne, E., O'Connor, G. M. and Glynn, T. J., 'The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micromachining of common metals in air,' Applied Surface Science, Vol. 233, pp. 275-287, 2004 https://doi.org/10.1016/j.apsusc.2004.03.229
  11. Srinivasan, V., Smrtic, M. A. and Babu, S. V., 'Excimer Laser Etching of Polymers,' Journal of Applied Physics, Vol. 59, No. 11, pp. 3861-3867, 1986 https://doi.org/10.1063/1.336728
  12. Chen, T. C. and Darling, R. B., 'Parametric studies on pulsed near ultraviolet frequency tripled Nd:YAG laser micromachining of sapphire and silicon,' Journal of Materials Processing Technology, Vol.169, pp.214-218, 2005 https://doi.org/10.1016/j.jmatprotec.2005.03.023
  13. Tunna, L., Kearns, A., O'Neill, W. and Sutcliffe, C. J., 'Micromachining of copper using Nd:YAG laser radiation at 1064, 532, and 355 nm wavelengths,' Optics & Laser Technology, Vol. 33, pp. 135-143, 2001 https://doi.org/10.1016/S0030-3992(00)00126-2
  14. Bauerle, D., Himmelbauer, M. and Arenholz, E., 'Pulsed laser ablation of polyimide: fundamental aspects,' Journal of Photochemistry and Photobiology A: Chemistry, Vol. 106, pp. 27-30, 1997 https://doi.org/10.1016/S1010-6030(97)00034-8
  15. Zeng, D. W., Yung, K. C. and Xie, C. S., 'UV Nd:YAG laser ablation of copper: chemical states in both crater and halo studied by XPS,' Applied Surface Science, Vol. 217, pp. 170-180, 2003 https://doi.org/10.1016/S0169-4332(03)00532-4