한국표면공학회지 (Journal of Surface Science and Engineering)

  • 제40권5호
  • /
  • Pages.209-213
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  • 2007
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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Al:ZnO의 펄스 스퍼터 증착에서 주파수에 따른 플라즈마의 특성과 기판 온도 변화

Plasma Characteristics and Substrate Temperature Change in Al:ZnO Pulse Sputter Deposition: Effects of Frequency

  • 양원균 (군산대학교 신소재.나노화학 공학부) ;
  • 주정훈 (군산대학교 신소재.나노화학 공학부)
  • Yang, Won-Kyun (Department of Materials Science & Engineering, Kunsan National University) ;
  • Joo, Jung-Hoon (Department of Materials Science & Engineering, Kunsan National University)
  • 발행 : 2007.10.31
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초록

Change of the plasma volume by pulse frequency in a bipolar pulsed DC unbalanced magnetron sputtering was investigated. As increasing the frequency at off duty 10% and at a constant power, the plasma volume was lengthened in vertical direction from the AZO target. When there is an electrically floated substrate, the vertical length of the plasma area was not affected by the pulse frequency. Instead, the diameter of the plasma volume was increased. We found that the temperature rise of a substrate was affected by the pulse frequency, too. As increasing it, the maximum temperature rise of a glass substrate was decreased from $132^{\circ}C\;to\;108^{\circ}C$.

키워드

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