Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Alignment Method of Ion Beam Axis in Focused Ion Beam System

집속이온빔장치에서의 이온빔축 얼라인먼트

  • 박철우 (한국산업기술대학교 기계공학과) ;
  • 이종항 (한국산업기술대학교 기계공학과) ;
  • 강승언 (광운대학교 전자물리학과)
  • Published : 2006.09.01
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Abstract

This paper describes an alignment method of the ion column which is used for a focused-ion-beam machining system. The alignment parameters for mechanical and electrical components are introduced, and also sample images are used for evaluating the experiments. The experimental results show that geometrical positions of mechanical components have an influence on the quality of emitted ion beam. In addition, we can successfully align the traveling axis of ions by using mechanical and electrical methods.

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References

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