International Journal of Quality Innovation

Korean Society for Quality Management (한국품질경영학회)
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Online Experts Screening the Worst Slicing Machine to Control Wafer Yield via the Analytic Hierarchy Process

  • Lin, Chin-Tsai (Graduate Institute of Business Management Yuanpei University of Science and Technology) ;
  • Chang, Che-Wei (Department of Information Management Yuanpei University of Science and Technology) ;
  • Wu, Cheng-Ru (Department of Finance, Yuanpei University of Science and Technology) ;
  • Chen, Huang-Chu (Graduate Institute of Business Management Yuanpei University of Science and Technology)
  • Published : 2006.08.30
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Abstract

This study describes a novel algorithm for optimizing the quality yield of silicon wafer slicing. 12 inch wafer slicing is the most difficult in terms of semiconductor manufacturing yield. As silicon wafer slicing directly impacts production costs, semiconductor manufacturers are especially concerned with increasing and maintaining the yield, as well as identifying why yields decline. The criteria for establishing the proposed algorithm are derived from a literature review and interviews with a group of experts in semiconductor manufacturing. The modified Delphi method is then adopted to analyze those results. The proposed algorithm also incorporates the analytic hierarchy process (AHP) to determine the weights of evaluation. Additionally, the proposed algorithm can select the evaluation outcomes to identify the worst machine of precision. Finally, results of the exponential weighted moving average (EWMA) control chart demonstrate the feasibility of the proposed AHP-based algorithm in effectively selecting the evaluation outcomes and evaluating the precision of the worst performing machines. So, through collect data (the quality and quantity) to judge the result by AHP, it is the key to help the engineer can find out the manufacturing process yield quickly effectively.

Keywords

References

  1. Alphonce, C. B.(1997), 'Application of the analytic hierarchy process in agriculture in developing countries,' Agricultural Systems, Vol. 53, pp. 97-112 https://doi.org/10.1016/S0308-521X(96)00035-2
  2. Brada, D. and Shmilovici, A.(2002), 'Data mining for improving a cleaning process in the semiconductor industry,' IEEE Transactions on Semiconductor Manufacturing, Vol. Vol. 15, No. 1, pp. 91-101 https://doi.org/10.1109/66.983448
  3. Butler, S. W. and Stefani, J. A.(1994), 'Supervisory run-to-run control of a polysicon gate etch using in situ elliposometry,' IEEE Transactions on Semiconductor Manufacturing, Vol. 7, pp. 193-201 https://doi.org/10.1109/66.286855
  4. Cunningham, S. P., Spanos, C. J., and Voros, K.(1995), 'Semiconductor yield improvement: results and best practices,' IEEE Transactions Semiconductor Manufacturing, Vol. 8, pp. 103-109 https://doi.org/10.1109/66.382273
  5. Delbecq, A. L., Van de Ven, A. H., and Gustafson, D. H.(1975), Group techniques for program planning: a guide to nominal group and Delphi processes, Illinois: Scott, Foresman and Company
  6. Fishburn, P. C.(1967), Additive utilities with incomplete product set: applications to priorities and assignments, Operations Research
  7. Frei, F. X. and Harker, P. T.(1999), 'Measuring aggregate process performance using AHP,' European Journal of Operational Research, Vol. 116, pp. 436-442 https://doi.org/10.1016/S0377-2217(98)00134-9
  8. Ho, C. T.(2004), 'Strategic evaluation of emerging technologies in the semiconductor foundry industry (Special case: Semiconductor foundry industry in Taiwan),' Portland State University, pp. 251-278
  9. Jaber, J. O. and Mohsen, M. S.(2001), 'Evaluation of non-conventional water resources supply in Jordan,' Desalination, Vol. 136, pp. 83-92 https://doi.org/10.1016/S0011-9164(01)00168-0
  10. Kwak, N. K. and Lee, C. W.(2002), 'Business process reengineering for health-care system using multicriteria mathematical programming,' European Journal of Operational Research, Vol. 140, pp. 447-458 https://doi.org/10.1016/S0377-2217(02)00082-6
  11. Lin, C. T., Chang, C. W., and Chen, C. B.(2005), 'Relative control philosophy- balance and continual change for forecasting abnormal quality characteristics in a silicon wafer slicing process,' International Journal Advanced Manufacturing Technology, Vol. 26, pp. 1109-1114 https://doi.org/10.1007/s00170-004-2067-x
  12. Lin, C. T., Chang, C. W., and Chen, C. B.(2004), 'Focus groups: impact of quality and process capability factors on silicon wafer slicing process,' International Journal of Manufacturing Technology and Management, Vol. 2, No. 2, pp. 171-184
  13. Lin, C. T., Chen, C. B., and Chang, C. W.(2002), 'Screening synchronously occurred multiple abnormal quality characteristics screening in a silicon wafer slicing process,' The Asian Journal on Quality, Vol. 3, No. 1, pp. 48-60 https://doi.org/10.1108/15982688200200004
  14. Lucas, J. M. and Saccussi, M. S.(1992), 'Exponentially weighted moving average control charts: properties and enhancements,' Technometrics, Vol. 24, pp. 216-231
  15. Murry, J. W. and Hammons, J. O.(1995), 'Delphi: A versatile methodology for conducting qualitative research,' Review of Higher Education, Vol. 18, No. 4, pp. 423-436 https://doi.org/10.1353/rhe.1995.0008
  16. Pai, P. F., Lee, C. E., and Su, T. H.(2004), 'A daily production model for wafer fabrication,' International Journal Advanced Manufacturing Technology, Vol. 23, pp. 58-63 https://doi.org/10.1007/s00170-002-1506-9
  17. Poh, K. L. and Ang, B. W.(1999), 'Transportation fuels and policy for Singapore: an AHP planning approach,' Computers and Industrial Engineering, Vol. 37, pp. 507-525 https://doi.org/10.1016/S0360-8352(00)00020-6
  18. Radash, D. K. and Kwak, N. K.(1998), 'An integrated mathematical programming model for offset planning,' Computers and Operations Research, Vol. 25, No. 12, pp. 1069-1083 https://doi.org/10.1016/S0305-0548(98)00031-8
  19. Robert, S.(1959), 'Control chart tests based on geometric moving averages,' Technometrics, Vol. 1, pp. 239-250 https://doi.org/10.2307/1266443
  20. Saaty, T. L.(1994), The Fundamentals of decision making and priority theory with the analytic hierarchy process, Vol. VI, AHP Series, RWS Publication, Pittsburgh, PA. pp. 1-527
  21. Saaty, T. L.(1990), 'How to mark a decision: the analytic hierarchy process,' European Journal of Operational Research, Vol. 48, No. 1, pp. 9-26 https://doi.org/10.1016/0377-2217(90)90057-I
  22. Saaty, T. L.(1980), The Analytic Hierarchy Process, New York: McGraw Hill
  23. Sachs, S. E. and Montgomery, D. C.(1997), 'Process capability indices and non-normal distributions,' Quality Engineering, Vol. 7, pp. 305-316
  24. Schniederjans, M. J. and Wilson, R. L.(1991), 'Using the analytic hierarchy process and goal programming for information system project selection,' Information and Management, Vol. 20, pp.333-342 https://doi.org/10.1016/0378-7206(91)90032-W
  25. Sung, W. C.(2001), 'Application of Delphi method, a qualitative and quantitative analysis, to the healthcare management,' Journal of Healthcare Management, Vol. 2, No. 2, pp. 11-19 https://doi.org/10.1016/S1474-8231(01)02021-3
  26. Yang, T., Su, C. T., and Hsu, Y. R.(2000), 'Systematic layout planning: a study on semiconductor wafer fabrication facilities,' International Journal of Operations and Production Management, Vol. 20, No. 11, pp. 1360-1372
  27. Yurdakul, M.(2004), 'AHP as a strategic decision-making tool to justify machine tool selection,' Journal of Materials Processing Technology, Vol. 146, No. 3, pp. 365-376 https://doi.org/10.1016/j.jmatprotec.2003.11.026