Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD

RF-PECVD로 증착된 DLC 박막의 온도 변화에 따른 트라이볼로지 특성

  • Lee Young-Ze (School of Mechanical Engineering, Sungkyunkwan University) ;
  • Cho Yong-Kyung (Graduate School of Mechanical Engineering, Sungkyunkwan University) ;
  • Shin Yun-Ha (Graduate School of Mechanical Engineering, Sungkyunkwan University)
  • 이영제 (성균관대학교 기계공학) ;
  • 조용경 (성균관대학교 대학원 기계공학과) ;
  • 신윤하 (성균관대학교 대학원 기계공학과)
  • Published : 2006.06.01
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Abstract

DLC (Diamond Like Carbon) films show very desirable surface interactions with high hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of hydrogenated DLC film is dependent on tribological environment, especially surrounding temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10N, and surrounding various temperatures of $25^{\circ}C,\;40^{\circ}C,\;55^{\circ}C\;and\;75^{\circ}C$. The results show considerable dependency of DLC tribological parameters on temperature. The friction coefficient decreased as the surrounding temperature increased. After tests the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track were also obtained by an atomic force microscope (AFM).

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References

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