International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Rapid Manufacturing of 3D Micro-products using UV Laser Ablation and Phase-change Filling

  • Shin Bo-Sung (ERC/NSDM, Pusan National University) ;
  • Kim Jae-Gu (Nanoprocess Group, Korea Institute of Machinery and Materials) ;
  • Chang Won-Suk (Nanoprocess Group, Korea Institute of Machinery and Materials) ;
  • Whang Kyung-Hyun (Nanoprocess Group, Korea Institute of Machinery and Materials)
  • Published : 2006.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

UV laser micromachining is generally used to create microstructures for micro-products through a sequence of lithography-based photo-patterning steps. However, the micromachining process is not suitable for rapid realization of complex 3D micro-products because it depends on worker experience. In addition, the cost and time required to make many masks are excessive. In this paper, a more effective and rapid micro-manufacturing process, which was developed based on laser micromachining, is proposed for fabricating micro-products directly using UV laser ablation and phase-change filling. The filling process is useful for holding the micro-products during the ablation step. The proposed rapid micro-manufacturing process was demonstrated experimentally by fabricating 3D micro-products from functional UV-sensitive polymers using 3D CAD data.

Keywords

References

  1. Dauer, S., Ehlert, A. and Buttgenbach, S., 'Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling,' Sensors and Actuators, Vol. 76, pp. 381-385, 1999 https://doi.org/10.1016/S0924-4247(99)00029-1
  2. Mullenborn, M., Dirac, H., Petersen, J. and Bouwstra, S., 'Fast three-dimensional laser micromachining of silicon for microsystems,' Sensors and Actuators, Vol. A 52, pp. 121-125, 1996
  3. Gandhi, M. V., Thompson, B. S. and Mass, D. J., 'Adaptable fixture design: an analytical and experimental study of fluidized bed fixturing,' ASME Journal of Mechanisms, Transmissions and Automation in Design, Vol. 108,pp. 155-121, 1986
  4. He, L., Namba, Y. and Narita, Y., 'Wavelength optimization for machining metals with the harmonic generation of a short pulsed Nd:YAG laser,' Precision Engineering Journal, International Society for Precision Engineering and Nanotechnology, Vol. 24, pp. 245-250, 2000
  5. Shin, B. S., Yang, S. B., Chang, W. S., Kim, J. G. and Kim, J. M., 'Rapid manufacturing of 3D-shaped microstructures by UV laser ablation,' Journal of the KSPE, Vol. 21, No.7, pp. 30-34, 2004
  6. Yoon, K. G., Shin, B. S., Choi, D. S., Lee, S. G., Kim, J. G. and Whang, K. H., 'Method and apparatus for making a minute product using UV laser beam,' Korea Patent No. 0364195, 2002
  7. Shin, B. S., Yang, D. Y., Choi, D. S., Kim, K. D., Lee, E. S., Je, T. J. and Whang, K. H., 'Development of automatic filling process using low-melting point metal for rapid manufacturing with using low-melting point metal for rapid manufacturing with machining process,' Journal of the KSPE, Vol. 19, No.3, pp. 88-94, 2002
  8. Shin, B. S., Yang, D. Y., Choi, D. S., Lee, E. S. and Whang, K. H., 'Development of rapid manufacturing process by machining with automatic filling,' Journal of the KSPE, Vol. 18, No.7, pp. 174-178,2001
  9. Lippert, T., Dickison, J. T., Langford, S. C., Furutani, H., Fukumura, H., Masuhara, H., Kunz, T. and Wokaun, A., 'Photopolymers designed for laser ablation - photochemical ablation mechanism,' Applied Surface Science, Vol. 127-129, pp. 117-121, 1998 https://doi.org/10.1016/S0169-4332(97)00620-X
  10. Yang, S. B., Chang, W. S., Kim, J. G., Shin, B. S. and Jeon, B. H., 'Micro channel fabrication technology using UV laser micrornachining,' Transactions of Materials Processing, Vol. 13, No.3, pp. 216-224, 2004 https://doi.org/10.5228/KSPP.2004.13.3.216