Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 5 Issue 4 Serial No. 17
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- Pages.29-34
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- 2006
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- 1738-2270(pISSN)
Evaporation Process Modeling for Large OLED Mass-fabrication System
대면적 유기EL 양산 장비 개발을 위한 증착 공정 모델링
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Lee, Eung-Ki
(Kongju National University, Division of Mechanical & Automotive Engineering)
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이응기
(공주대학교 기계자동차공학부)
- Published : 2006.12.31
Abstract
In order to design an OLED(Organic Luminescent Emitting Device) evaporation system, geometric simulation of film thickness distribution profile is required. For the OLED evaporation process, thin film thickness uniformity is of great practical importance. In this paper, a geometric modeling algorithm is introduced for process simulation of the OLED evaporating process. The physical fact of the evaporating process is modeled mathematically. Based on the developed method, the thickness of the thin-film layer can be successfully controlled.