반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
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고속 세틀링과 고정밀 위치 제어를 위한 모드 변경 제어 기법

A New Mode Switching Control for Fast Settling and High Precision Positioning

  • 김정재 (한국과학기술원 기계공학과 NOM 연구실) ;
  • 최영만 (한국과학기술원 기계공학과 NOM 연구실) ;
  • 김기현 (삼성전자 메카트로닉스 연구센터) ;
  • 권대갑 (한국과학기술원 기계공학과(㈜나노스코프시스템즈)) ;
  • 홍동표 (전북대학교 정밀기계공학과)
  • Kim, Jung-Jae (Nano Opto-Mechatronics Lab., Dept. of Mechanical Engineering, KAlST) ;
  • Choi, Young-Man (Nano Opto-Mechatronics Lab., Dept. of Mechanical Engineering, KAlST) ;
  • Kim, Ki-Hyun (Mechatronics center, Samsung Electronics) ;
  • Gweon, Dae-Gab (Dept. of Mechanical Engineering, KAIST (NanoScopeSystems)) ;
  • Hong, Dong-Pyo (Dept. of Precision and Mechanical Engineering, Chonbuk University)
  • 발행 : 2006.12.31
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초록

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

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