조명전기설비학회논문지 (Journal of the Korean Institute of Illuminating and Electrical Installation Engineers)

  • 제20권1호
  • /
  • Pages.19-26
  • /
  • 2006
  • /
  • 1229-4691(pISSN)
  • /
  • 2287-5034(eISSN)
한국조명전기설비학회 (The Korean Institute of IIIuminating and Electrical Installation Engineers)
권호 표지
DOI QR코드

DOI QR Code

기체레이저의 여기를 위한 용량결합고주파(ccrf) 방전시스템

Capacitively Coupled Radio Frequency Discharge System for Excitation of Gas Laser

  • 최상태 (경주대학교 컴퓨터정보시스템공학부)
  • 발행 : 2006.01.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

용량결합고주파(ccrf)방전은 홀로우음극방전이나, 직류방전에 비해서 방전관의 구조가 간단하고 균질한 플라즈마를 발생시키는 장점을 가지고 있다. 본 논문에서는 ccrf-방전을 기체레이저의 여기에 적용하기 위한 목표를 가지고 방전시스템을 선계, 제작하여 연속운전의 균질한 방전을 실현하였다. 13.56[MHz]의 rf-전력을 방전 내부로 효율적으로 결합하기 위해서 내부직경 5[mm]의 레이저방전관에 특수하게 제작된 rf-전극을 사용하였다. 또한 방전관의 임피던스가 rf-발생기의 풀력저항 50[$\Omega$]에 정합을 이루는 임피던스 정합회로를 개발하였다.

The ccrf-discharge has in comparison with the hollow-cathode discharge and DC-discharge some advantages: Simple design of the tube and homogeneous plasma. The ccrf-discharge was researched with the goal, to use on the excitation of the gas laser. In this work a rf-exciting system was planned and developed. With it a homogeneous discharge was produced in the cw operation. To supply the rf-power with the frequency 13.56[MHz] effectively in the discharge, laser tube were used with inner diameter of 5[mm] and the specially developed rf-electrodes. A matching circuit was composed also. Thereby the impedance of the discharge tube was adjusted to the 50[$\Omega$] output resistance of the rf-source.

키워드

참고문헌

  1. W. J. Witteman, V. N. Ochkin, 'Gas lasers - recent developments and future prospects', Kluwer Academic Pub., Printed in Netherlands, pp. 55-67, 1996
  2. M. F.Sem, V. Ya. Khasilev, V. S. Mikhalevskii, G. N. Tolmachev, 'Metal vapour ion lasers with excitation by transverse radiofrequency discharge', Proc. Int. Conf. Lasers, New Orleans, pp. 182, 1980
  3. Yuri P. Raiser, 'Modern considerations on two forms of radio-frequency capacitive discharge at intermediate pressure and comparison with low pressure rf-discharge', XXI. Int. Conf. on Phenomena in Ionized Gases, Vol.III: Invited and additional papers, Ruhr-Uni. Bochum, pp. 245, 1993
  4. A. N. Korolkov, V. A. Stepanov, 'Spectroscopic and probe investigations of a high-frequency transverse discharge in helium', Zhurnal Prikladnoi Spekroskopii, 38, No.5, pp. 720, 1983
  5. N. Reich, J. Mentel, J. Mizeraczyk, 'cw radio-frequency excited white-light He-Cd+ laser', IEEE J. Quantum Electronics, Vol. 31, No. 11, pp. 1902-1909, 1995 https://doi.org/10.1109/3.469268
  6. V. S. Mikhalevskii, G. N. Tolmachev, V. Ya. Khasilev, 'Optimization of the excitaion conditions of a transeverse rf discharge He-Cd laser', Sov. J. Quantum Electron., 10, No. 7, pp. 884, 1980 https://doi.org/10.1070/QE1980v010n07ABEH010445
  7. G. L. Hall, 'The ARRL antenna book', The American Radio League, Inc., Newigton, USA. pp. 4.1-4.11, 1984
  8. S. T. Choi, 'A study on optical gain and output-coupling power of selenium vapour laser using isotope helium', J. OSK, Vol. 11, No. 2, 114-118, 2000
  9. S. T. Choi, 'A study on output power characteristic of selenium vapour multiline laser using isotope helium and helium filter', J. KIIEE, Vol. 18, No. 2, 16-22, 2004
  10. Meinke, Gundlach, 'Taschenbuch der Hochfrequenz- technik', Band 2: Grundlagen, 4, Auflage, Springer-Verlag, Berlin, Heidelberg, pp. E14, 1986

피인용 문헌

  1. A Study on the Optical Gain Characteristics of a UV Line 250.199nm from Helium-Zinc Discharge Excited by CCRF with Overlapped DC vol.28, pp.7, 2014, https://doi.org/10.5207/JIEIE.2014.28.7.013