MEMS 기술을 이용한 마이크로 전자 패키징 기술

Application of MEMS Technology in Microelectronic Packaging

  • 김종웅 (성균관대학교 신소재공학과) ;
  • 김대곤 (성균관대학교 신소재공학과) ;
  • 문원철 (성균관대학교 마이크로 전자 및 반도체 패키징 기술개발 사업단) ;
  • 문정훈 (수원과학대학 일렉트로닉스패키징과) ;
  • 서창제 (성균관대학교 신소재공학과) ;
  • 정승부 (성균관대학교 마이크로 전자 및 반도체 패키징 기술개발 사업단)
  • 발행 : 2006.04.01

초록

키워드

참고문헌

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  11. K. Hara, Y. Kurashima. N. Hashimoto. K. Matsui. Y. Matsuo, I. Mivazawa. T. Kobayashi. Y, Yokoyama. M. Fukazawa : Optimization for chip stack in 3-D packaging. IEEE Transactions on Advanced Packaging. 28. (2005). 367-376 https://doi.org/10.1109/TADVP.2005.852978
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