The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study on Thermal Performances of Micro Gas Sensor with Micro Hotplate

마이크로 핫플레이트를 갖는 마이크로 가스센서의 열적성능에 관한 연구

  • 주영철 (순천향대학교 기계공학과) ;
  • 임준형 (순천향대학교 기계공학과) ;
  • 이주헌 (순천향대학교 정보기술공학부) ;
  • 김창교 (순천향대학교 정보기술공학부)
  • Published : 2006.05.01
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Abstract

A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

Keywords

References

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