The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Polymeric Wavelength Filter Based on a Bragg Grating Using Nanoimprint Technique

나노 임프린트 기술을 이용한 폴리머 도파로 기반의 브래그 격자형 파장 필터

  • 안세원 (LG전자기술원 소자재료연구소) ;
  • 이기동 (LG전자기술원 소자재료연구소) ;
  • 김도환 (광운대학교 전자공학과) ;
  • 진원준 (광운대학교 전자공학과) ;
  • 이상신 (광운대학교 전자공학과)
  • Published : 2006.05.01
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Abstract

A polymeric waveguide-type wavelength filter based on a Bragg grating has been proposed and fabricated using the simple nanoimpring technique, for the first time to our knowledge. An ultraviolet transparent stamp with the single-mode waveguide pattern incorporating a surface-relief-type Bragg grating was specially designed selective dry-etching process. Using this stamp, the device fabrication was substantially involving just a single-step process of imprint followed by polymer spin-coating. The achieved maximum reflection was higher than 25 dB at the center wavelength of 1569 nm. And the 3-dB bandwidth was 0.8 nm for the device length of 1.5 cm.

Keywords

References

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