대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

나노 임프린트 기술을 이용한 폴리머 도파로 기반의 브래그 격자형 파장 필터

Polymeric Wavelength Filter Based on a Bragg Grating Using Nanoimprint Technique

  • 안세원 (LG전자기술원 소자재료연구소) ;
  • 이기동 (LG전자기술원 소자재료연구소) ;
  • 김도환 (광운대학교 전자공학과) ;
  • 진원준 (광운대학교 전자공학과) ;
  • 이상신 (광운대학교 전자공학과)
  • 발행 : 2006.05.01
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⟨ 이전 논문 다음 논문 ⟩

초록

A polymeric waveguide-type wavelength filter based on a Bragg grating has been proposed and fabricated using the simple nanoimpring technique, for the first time to our knowledge. An ultraviolet transparent stamp with the single-mode waveguide pattern incorporating a surface-relief-type Bragg grating was specially designed selective dry-etching process. Using this stamp, the device fabrication was substantially involving just a single-step process of imprint followed by polymer spin-coating. The achieved maximum reflection was higher than 25 dB at the center wavelength of 1569 nm. And the 3-dB bandwidth was 0.8 nm for the device length of 1.5 cm.

키워드

참고문헌

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