A Study of Micro Displacement Measurement of Micro System using the Laser Interferometer

레이저 간섭계를 이용한 마이크로 시스템의 미소변위 측정에 관한 연구

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.