REBCO 초전도 박막제조를 위한 Fluorine-free MOD 전구체 용액 개발

Development of Fluorine-free MOD Precursor Solution for fabricating REBCO Superconducting Films

New precursor solution with dichloroacetic acid (DCA) was developed for fabricating high $J_c$ REBCO film. DCA based-precursor solution was coated on $LaAlO_3$(001) substrate by dip coating method. Processing parameters such as oxygen partial pressure, water vapor, ramping rate and pyrolysis temperature were controlled in order to obtain a good epitaxial film. The film with thickness of 0.5 micrometer was obtained by single coating and no crack was observed at calcined films. Oxygen partial pressure was controlled in the range of $100{\sim}1,000$ ppm and conversion heat treatment was carried out at the temperature range of $705-765^{\circ}C$. A critical transition temperature ($T_c$) of 90 K and a critical transport current density ($J_c$) of $>0.5\;MA/cm^2$ (77 K and self-field) were obtained for the GdBCO film. It is thought that fluorine-free MOD solution using DCA is promising precursor solution for fabricating high quality REBCO films.