Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication of Movable Nanostructures by Selective Etching of Nanoplates

나노판의 선택적 식각에 의한 이동이 가능한 나노구조체 제작

  • 윤용주 (한국표준과학연구원 전략기술연구부, 서강대학교 물리학과) ;
  • 아칠성 (한국표준과학연구원 전략기술연구부, 한국전자통신연구원 IT융합부품연구소) ;
  • 윤완수 (한국표준과학연구원 전략기술연구부) ;
  • 하동한 (한국표준과학연구원 전략기술연구부)
  • Published : 2006.03.01
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Abstract

Movable nanometer-scale structures are fabricated by selective etching of single crystalline Au nanoplates. The nanostructures have arbitrary shapes like gear and alphabet 'A' with in-plane size less than 500 m and thickness of $25\sim60nm$. They could be moved successfully on the substrate using a nanornanipulator installed in a focused ion beam system. Our approach is expected to be useful in fabricating various kinds of nanocomponents which can play a role as building blocks for the sophisticated nanodevices or micromachines.

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References

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