Journal of the Korean Society for Aeronautical & Space Sciences (한국항공우주학회지)

The Korean Society for Aeronautical and Space Sciences (한국항공우주학회)
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Development of Micropump using Circular Lightweitht Piezo-composite Actuator

원형 경량 압전 복합재료 작동기를 이용한 마이크로 펌프의 개발

  • Published : 2006.06.30
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Abstract

In this paper, we focus on improving the performance of the piezoelectric diaphragms of valveless micropumps. A circular lightweight piezoelectric composite actuator (LIPCA) with a high level of displacement and output force has been developed for piezoelectrically actuated micropumps. We used numerical and experimental methods to analyze the characteristics of the actuator to select optimal design. With the developed circular LIPCA, we fabricated a valveless micropump by photo-lithography and PDMS molding techniques. The displacement of the diaphragm, the flow rate and the back pressure of the micropump were evaluated and discussed. With a semi-empirical method, the flow rate with respect to driving frequency was predicted and compared with experimental one. The test results confirm that the circular LIPCA is a promising candidate for micropump application and can be used as a substitute for a conventional piezoelectric actuator diaphragm.

본 논문에서는 무밸브 마이크로펌프에 사용되는 압전 다이아프램의 성능을 향상시키는 방법이 연구되었다. 큰 작동 변위와 작동력을 가지는 원형 형태의 경량 압전 복합재료 작동기(LIPCA)를 마이크로 펌프용으로 제작하였다. 유한요소 해석과 실험을 통하여 원형 LIPCA의 성능을 예측하여 최적의 적층 형태를 설계하였다. 최적의 원형 LIPCA를 기반으로 포토리소그라피법과 PDMS 몰딩법을 사용하여 무밸브 마이크로 펌프를 제작하였다. 압전 다이아프램의 작동 변위 및 마이크로 펌프의 유량과 배압을 실험적으로 계측하였고, 반경험식을 사용하여 예측한 유량과 비교하였다. 이상의 연구에서 원형 LIPCA가 마이크로 펌프용으로 사용되는 보통의 압전 작동 다이아프램을 대체할 수 있는 우수한 작동기임을 확인할 수 있었다.

Keywords

References

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