The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Fabrication and Evaluation of the Flexible and Implantable Micro Electrode

생체 삽입형 유연한 마이크로 전극의 제작 및 평가

  • 백주열 (단국대 의대 의공학연구소) ;
  • 권구한 (단국대 의대 의공학과) ;
  • 이상운 (단국대 의대 의공학여구소) ;
  • 이기암 (단국대 전자물리학과) ;
  • 이상훈 (단국대 의대 의공학과)
  • Published : 2006.02.01
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Abstract

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ATi and 1000 A Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 $\mu$m. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 $\mu$m with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days.

Keywords

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