Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Deposition of (Ti, Cr, Zr)N-$MoS_{2}$ Thin Films by D.C. Magnetron Sputtering

  • Kim, Sun-Kyu (School of Materials Science and Engineering, University of Ulsan) ;
  • Vinh, Pham-Van (School of Materials Science and Engineering, University of Ulsan)
  • Published : 2006.12.31
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Abstract

As technology advances, there is a demand for development of hard solid lubricant coating. (Ti, Cr, Zr)N-$MoS_2$ films were deposited on AISI H13 tool steel substrate by co-deposition of $MoS_2$ with (Ti, Cr, Zr)N using a D.C. magnetron sputtering process. The influence of the $N_2Ar$ gas ratio, the amount of $MoS_2$ in the films and the bias voltage on the mechanical and structural properties of the films were investigated. The highest hardness level was observed at the $N_2/Ar$ gas ratio of 0.3. Hardness of the films did not change much with the increase of the $MoS_2$ content in the films. As the substrate bias potential was increased, hardness level of the film reached maximum at -150 V. Surface morphology of these films indicated that high hardness was attributed to the fine dome structure.

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References

  1. S. K. Kim, Y. H. Kim, K. H. Kim, Surf. Coat. Technol., 169-170 (2003) 428 https://doi.org/10.1016/S0257-8972(03)00181-6
  2. N. M. Renevier, J. Hampshire, V. C. Fox, J. Witts, T. Allen, D. G. Teer, Surf. Coat. Technol., 142-144 (2001) 69
  3. X. Zhang, W. Lauwerens, J. He, J.-P. Cellis, J. Vac. Sci. Technol., A21 (2) (2003) 416
  4. M. C. Simmons, A. Sayans, E. Pflueger, H. Van Swygenhoven, Surf. Coat. Technol., 126 (2000) 15 https://doi.org/10.1016/S0257-8972(00)00521-1
  5. S. Carrera, O. Salas, J. J. Moore, A. Woolveraton, E. Sutter, Surf. Coat. Technol., 169 (2003) 25
  6. R. Gilmore, M. A. Baker, P. N. Gibson, W. Gissler, M. Stoiber, P. Lobicher, C. Mitterer, Surf. Coat. Technol., 108-109 (1998) 345 https://doi.org/10.1016/S0257-8972(98)00602-1
  7. S. K. Kim, B. C. Cha, Surf. Coat. Technol., 188-189 (2004) 174 https://doi.org/10.1016/j.surfcoat.2004.08.013
  8. S. K. Kim, J. H. Kim, J. Kor. Inst. Surf. Eng. 39, 2 (2006) 70
  9. S. K. Kim, B. C. Cha, J. S. Yoo, Surf. Coat. Technol., 177-178 (2004) 434 https://doi.org/10.1016/j.surfcoat.2003.09.021
  10. S. K. Kim, B. C. Cha, Thin Solid Films, 475 (2005) 202 https://doi.org/10.1016/j.tsf.2004.08.059