XRD Patterns and Bismuth Sticking Coefficient in $Bi_2Sr_2Ca_nCu_{n+1}O_y(n\geq0)$ Thin Films Fabricated by Ion Beam Sputtering Method

  • Yang, Seung-Ho (Department of Hospital BioMedical Engineering, Dongshin University) ;
  • Park, Yong-Pil (Department of Hospital BioMedical Engineering, Dongshin University)
  • Published : 2006.12.30

Abstract

[ $Bi_2Sr_2Ca_nCu_{n+1}O_y(n{\geq}0)$ ] thin film is fabricatedvia two different processes using an ion beam sputtering method i.e. co-deposition and layer-by-layer deposition. A single phase of Bi2212 can be fabricated via the co-deposition process. While it cannot be obtained by the layer-by-layer process. Ultra-low growth rate in our ion beam sputtering system brings out the difference in Bi element adsorption between the two processes and results in only 30% adsorption against total incident Bi amount by layer-by-layer deposition, in contrast to enough Bi adsorption by co-deposition.

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References

  1. Y. Tazoh and S. Miyazawa, Appl. phys. Lett., 62, p. 408, 1993 https://doi.org/10.1063/1.108917
  2. Y. P. Park, J. U. Lee, Journal of KIEEME, vol. 11, No.4, pp. 334-339, 1998
  3. Y. P. Park, Journal of EElS, vol. 3, No.4, pp. 491-494, 1998
  4. Y. Kasai, S. Sakai, J. Crystal Growth, 115, p. 758, 1991 https://doi.org/10.1016/0022-0248(91)90840-2
  5. Y. P. Park, H. K. Lee, K. W. Lee and J. U. Lee, Journal of KlEEME, vol. 13, No.1, pp. 80-84, 2000
  6. S. C. Marschman and D. C. Lynch, Canadian J. Chem, Eng., p.875, 1984
  7. K. Nakamura and T. Hatano, J. Appl. Phys., 77, p. 6462, 1995