Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)
- Volume 2 Issue 1
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- Pages.85-90
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- 2006
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- 1738-6845(pISSN)
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- 2288-2022(eISSN)
Measurement and Verification of Thermal Conductivity of Multilayer Thin Dielectric Film via Differential $3\omega$ Method
차등 $3\omega$ 기법을 이용한 다층 유전체 박막의 열전도도 측정 및 검증
- Published : 2006.03.01
Abstract
In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential
Keywords
- Thermal Conductivity;
- Differential $3\omega$ Method;
- Multilayer Thin Dielectric Film;
- Protective Layer;
- Heat Spreading Effect