Modeling of FBAR Devices with Bragg Reflectors

  • Lee, Jae-Young (School of Information and Communications University(ICU)) ;
  • Yoon, Gi-Wan (School of Information and Communications University(ICU)) ;
  • Linh, Mai (School of Information and Communications University(ICU))
  • Published : 2006.09.30

Abstract

Film bulk acoustic resonators for radio frequency wireless applications are presented. Various simulations and modeling were carried out. The impedance of a five-layered FBAR showed almost the same trend of the wideband characteristics as that of an ideal FBAR, but the characteristics of the higher modes appear to be much more suppressed. In addition, the wideband impedance decreased with increasing device size. The resonance characteristics depend strongly on the physical dimensions.

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References

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