References
- P. J. Silverman, 'Insertion of EUVL into High-volume Manufacturing', Proc SPIE, 2001, 4343, 12-18
- J. Roberts, T. Bacuita, R. L. Bristol, H. Cao, M. Chandhok, S. H. Lee, M. Leeson, T. Liang, E. Panning, B. J. Rice, U. Shah, M. Shell, W. Yueh, and G. Zhang, 'Exposing Extreme Ultraviolet Lithography at Intel', Microelectron Eng, 2006, 83, 672-675 https://doi.org/10.1016/j.mee.2005.12.037
- Y.-J. Kwark, J. P. Bravo, M. Chandhok, H. Cao, H. Deng, E. Gullikson, and C. K. Ober, 'Absorbance Measurement of Polymers at EUV Wavelength: Correlation between Experimental and Theoretical Calculations', J Vac Sci Technol B, in press
-
R. F. Cunico, 'Diels-Alder Reaction of
$\alpha$ ,$\beta$ -Unsaturated Trihalosilanes with Cyclopentadiene', J Org Chem, 1971, 36, 929-932 https://doi.org/10.1021/jo00806a015 -
J. R. Stille, B. D. Santarsiero, and R. H. Grubbs, 'Rearrangement of Bicyclo[2.2.1]heptane Ring Systems by Titanocene Alkylidene Complexes to Bicyclo[3.2.0]heptane Enol Ethers. Total Synthesis of
$(\pm}-$\Delta^{9(12)}$ -Capnellene', J Org Chem, 1990, 55, 843-862 https://doi.org/10.1021/jo00290a013 - G. N. Taylor, L. E. Stillwagon, F. M. Houlihan, T. M. Wolf, D. Y. Sogah, and W. R. Hertler, 'Positive, Chemically Amplified Aromatic Methacrylate Resist Employing the Tetrahydropyranyl Protecting Group', Chem Mater, 1991, 3, 1031-1040 https://doi.org/10.1021/cm00018a017
- www-cxro.lbl.gov/optical_constants/filter2
- W. E. Crowe, J. P. Mitchell, V. C. Gibson, and R. R. Schrock, 'Chain-Transfer Agents for Living Ring-Opening Metathesis Polymerization Reactions of Norbornene', Macromolecules, 1990, 23, 3534-3536 https://doi.org/10.1021/ma00216a025
- A. D. Benedicto, J. P. Claverie, and R. H. Grubbs, 'Molecular Weight Distribution of Living Polymerization Involving Chain-Transfer Agents: Computational Results, Analytical Solutions, and Experimental Investigations Using Ring-Opening Metathesis Polymerization', Macromolecules, 1995, 28, 500-511 https://doi.org/10.1021/ma00106a013
- H. Katayama, F. Yonezawa, M. Nagao, and F. Ozawa, 'Ring-Opening Metathesis Polymerization of Norbornene Using Vinylic Ethers as Chain-Transfer Agents: Highly Selective Synthesis of Monofunctional Macroinitiators for Atom Transfer Radical Polymerization', Macromolecules, 2002, 35, 1133-1136 https://doi.org/10.1021/ma0110249
- F. Stelzer et al., presented at the 230th ACS National Meeting, Boston, 2002