International Journal of Precision Engineering and Manufacturing

  • 제7권4호
  • /
  • Pages.3-7
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  • 2006
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler

  • Yoo, Hong-Ki (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST) ;
  • Lee, Seung-Woo (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST) ;
  • Kang, Dong-Kyun (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST) ;
  • Kim, Tae-Joong (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST) ;
  • Gweon, Dae-Gab (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST) ;
  • Lee, Suk-Won (Micro Nano System Technology R/D Lab, Institute of Intelligent Systems, Mechatronics Center, Samsung Electronics Co, Ltd) ;
  • Kim, Kwang-Soo (Micro Nano System Technology R/D Lab, Institute of Intelligent Systems, Mechatronics Center, Samsung Electronics Co, Ltd)
  • 발행 : 2006.10.01
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초록

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

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참고문헌

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