The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Effects of Cooling Rate of Pre-heated Substrate on C-Axis Orientation of ZnO Prepared by RF Sputter Deposition

RF 스퍼터를 이용하여 ZnO 증착 시 기판의 냉각율이 박막의 c-축 배향성에 미치는 영향

  • 박성현 (경원대 공대 전기전자공학과) ;
  • 이능헌 (경원대 공대 전기전자공학과)
  • Published : 2006.12.01
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Abstract

ZnO thin films were prepared by RF magnetron sputter deposition on p-Si(100) wafer with various cooling rates of substrate temperature such as the substrates were pre-heated to $400^{\circ}C$ before the deposition and then cooled down naturally or slowly to $300^{\circ}C,\;200^{\circ}C,\;100^{\circ}C$, and R.T. by the temperature controller during the deposition. Crystalline and micro-structural characteristics of the films were investigated by XRD and SEM. ZnO films which cooled down naturally or slowly by the temperature controller during the deposition, especially the film were deposited with cooling down from $400^{\circ}C\;to\;200^{\circ}C$ slowly. showed the most outstanding c-axis preferred orientation.

Keywords

References

  1. F. R. Boom, D. J. Yntema, F. C. M. Van De Pol, M. Flwenspoek, J. H. J. Fluitman and Th. J. A. Popma, 'Thin-film ZnO micro-mechanical actuator at low frequencies', Sensors and Actuators., Vol. A21-A23, p. 226, 1990
  2. S. Pizzini, N. Butta, D. Narducci, and M. Palladino, 'Thick film ZnO resistive gas sensors', J. Electrochern. Soc., Vol. 136, No.7, p, 1945, 1989 https://doi.org/10.1149/1.2097092
  3. Yasuhiro Igasaki and Hiromi Saito, 'Substrate temperature dependence of electrical properties of ZnO:Al epitaxial films on sapphiret(1210)', J Appl. Phys., Vol. 69, No.4, p. 2190, 1991 https://doi.org/10.1063/1.348748
  4. H. Nanto, T. Minami, S. Shooii, and S. Takata, 'Electrical and optical properties of zinc oxide thin films prepared by magnetron sputtering for transparent electrode applications', J Appl. Phys., Vol. 55, No.4, p. 1029, 1984 https://doi.org/10.1063/1.333196
  5. R. Wang, L. L. H. King, and Arthur W. Sleight, 'Highly conducting transparent thin films based on zinc oxide', J mater. Res., Vol. 11, No 7, p. 1659, 1996 https://doi.org/10.1557/JMR.1996.0208
  6. T. Shiosaki, S. Ohnishi and A. Kawabata, 'Optical properties of single-crystal-line ZnO film smoothly CVD on intermediately sputtered thin ZnO film on Sapphire', J Appl, Phys., Vol. 50, No.5, p. 3113, 1979 https://doi.org/10.1063/1.326391
  7. S. Maniv and A. Zangvil, 'Controlled texture of reactively RF sputtered ZnO thin film', J Appl, Phys., Vol. 49, p, 2787, 1978 https://doi.org/10.1063/1.325158
  8. 이종덕, 송준태, 'RF magnetron sputtering 법으로 ZnO 박막 제조시 기판온도에 따른 c축 배향성에 관한 연구', 전기전자재료학회 논문지, Vol. 9, No.2, p. 196, 1996
  9. 박성현, 추순남, 이능헌, '압전층의 2단 증착법을 이용한 체적 음향파 박막형 공진기의 제작과 성능향상에 관한 연구', 대한전기학회 논문지, Vol. 54C, No.7, p. 308, 2005
  10. Jae-Won Kim, Hong-Seong Kang and Sang-Yeol Lee, 'Effect of Deposition Rate on the Property of ZnO Thin Films Deposited by Pulsed Laser Deposition', J Elec. Eng. & Tech., Vol. 1, No.1, p. 98, 2006 https://doi.org/10.5370/JEET.2006.1.1.098
  11. A. Doller, Y. Casaux, M. Matecki, and Rodriguez Clemente, 'Chemical vapour deposition of poly-crstalline AIN films from AlCI3-NH3 mixtures', Thin Solid Films, Vol. 406, p. 118, 2002 https://doi.org/10.1016/S0040-6090(01)01792-8
  12. Wang Bo, Wang Mei, Wang Ruzhi, Huang Anping, Zhou Hua, Zou Yunjuan, Yan Hui, and Wong Seining, 'The growth of AlN film composed of slikworm-shape grains and the orientation mechanism', Materials Letters, Vol. 53, p. 367, 2002 https://doi.org/10.1016/S0167-577X(01)00509-2
  13. Hyoun Woo Kim and Nam Ho Kim, 'Structural of room-temperature RF magnetron sputtered ZnO films under different RF powered conditions', Materials Science and Engineering B, Vol. 103, p, 297, 2003 https://doi.org/10.1016/S0921-5107(03)00281-2
  14. F. Chaabouni, M. Abaab, and B. Rezig, 'Effect of the substrate temperature on the properties of ZnO films grown by RF magnetron sputtering', Materials Science and Engineering B, Vol 109, p. 336, 2004