Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment

  • Lee, Jyh-Jone (Department of Mechanical Engineering, National Taiwan University) ;
  • Chen, Dar-Zen (Department of Mechanical Engineering, National Taiwan University) ;
  • Pai, Wei-Ming (Department of Mechanical Engineering, National Taiwan University) ;
  • Wu, Tzong-Ming (Industrial Technology Research Institute, Hsinchu)
  • Published : 2006.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents, the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.

Keywords

References

  1. Bonora, A. C. and Oen, J. T., 1996, 'Direct Loadlock Interface,' United States Patent, No.5, 586,585
  2. Bonora, A. C. and Rosenquist, F. T., 1991, 'Sealable Transportable Container Having Improved Latch Mechanism,' United States Patent, No. 4,995,430
  3. Bonora, A. C., Rosenquist, F. T. and Jain, S., Davis, M. R., 1998, 'Sealable, Transportable Container Having a Breather Assembly,' United States Patent, No. 5,740,845
  4. Book of SEMI standards, SEMI E19-0697
  5. Book of SEMI standards, SEMI E62-0999
  6. Buchsbaum, F. and Freudenstein, F., 1970, 'Synthesis of Kinematic Structure of Geared Kinematic Chains and Other Mechanisms,' Mechanism and Machine Theory, Vol. 5, pp. 357-392
  7. Datseris, P. and Palm, W., 1985, 'Principles on the Development of Mechanical Hands Which Can Manipulate Objects by Means of Active Control,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 107, No.2, pp. 148-156 https://doi.org/10.1115/1.3258703
  8. Dobrjanskyj, L. and Freudenstein, F., 1967, 'Some Applications of Graph Theory to The Structural Analysis of Mechanisms,' ASME Journal of Engineering for Industry, Vol. 89, pp. 153-158 https://doi.org/10.1115/1.3609988
  9. Doche, C., 1990, 'Wafer Confinement for Control of Contamination in Microelectronics,' Solid State Technology, Vol. 33, No.8, pp. Sl-S5 https://doi.org/10.1016/0038-1101(90)90002-V
  10. Erdman, A. G. and Bowen, J., 1981, 'Type and Dimensional Synthesis of Casement Window Mechanism,' Mechanical Engineering, Vol. 103, pp.46-55
  11. Fan, H. K., Lee, J. J. and Huang, G. J., 1999, 'Latch Mechanism for Wafer Container,' United States Patent, No. 5,931,512
  12. Freudenstein, F. and Maki, E. R., 1979, 'The Creation of Mechanisms According to Kinematic Structure and Function,' Journal of Environment and Planning, Vol. 6, pp. 375-391 https://doi.org/10.1068/b060375
  13. Freudenstein, F. and Maki, E. R., 1983, 'Development of an Optimum Variable-Stroke Internal-Combustion Engine Mechanism from The Viewpoint of Kinematic Structure,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 105, No.2, pp. 259-267 https://doi.org/10.1115/1.3258519
  14. Freudenstein, F. and Maki, E. R., 1984, 'Kinematic Structure of Mechanisms for Fixed and Variable-Stroke Axial-Piston Reciprocating Machines,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 355 - 364 https://doi.org/10.1115/1.3267419
  15. Hosoi, M., 1998, 'Shipping Container,' United States Patent, No. 5,988,392
  16. Maney, G. A., O'Sullivan, A. W. and Faraco, W. G., 1987, 'Sealed Standard Interface Apparatus,' United States Patent, No. 4,674,939
  17. Mayourian, M. and Freudenstein, F., 1984, 'Development of an Atlas of The Kinematic Structures of Mechanisms,' ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 458-461 https://doi.org/10.1115/1.3258594
  18. Mikkelsen, K. J., Adams, M. S., Bores, G. and Wiseman, B. S., 1999, 'Wafer Enclosure with Door,' United States Patent, No. 5,957,292
  19. Muka, R. S., 1997, 'Door Drive Mechanisms for Substrate Carrier and Load Lock,' United States Patent, No. 5,609,459
  20. Muka, R. S., 1998, 'Vacuum Integrated SMIF System,' United States Patent, No. 5,752,796
  21. Muka, R. S., Pippins, M. W. and Drew, M. A., 1997a, 'Batchloader for Substrate Carrier on Load Lock,' United States Patent, No. 5,607,276
  22. Muka, R. S., Pippins, M. W. and Drew, M. A., 1997b, 'Cluster Tool Batchloader of Substrate Carrier,' United States Patent, No. 5,613,821
  23. Murata, M., Tanaka, T. and Morita, T., 1998, 'Sealable Container,' United States Patent, No. 5,743,424
  24. Nyseth, D. L., 1998, 'Wafer Carrier with Door,' United States Patent, No. 5,711,427
  25. Parikh, M. and Kaempf, D., 1984, 'SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing,' Solid State Technology, Vol. 27, No.7, pp. 111-115
  26. Tsai, L. W., 2000, Mechanism Design: Enumeration of Kinematic Structure According to ？Function, CRC Press, New York
  27. Woo, L. S., 1967, 'Type Synthesis of Plane Linkages,' ASME Journal of Engineering for Industry, Vol. 89, pp. 159-172 https://doi.org/10.1115/1.3609989
  28. Yan, H. S., 1992, 'A Methodology for Creative Mechanism Design,' Mechanism and Machine Theory, Vol. 27, No.3, pp. 235-242 https://doi.org/10.1016/0094-114X(92)90013-8