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피인용 문헌
- Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering vol.51, pp.7, 2011, https://doi.org/10.1016/j.microrel.2011.03.031
- A Study on Physical Properties of Carbon Nitride Films and Application for Sensor Materials vol.20, pp.5, 2007, https://doi.org/10.4313/JKEM.2007.20.5.436